Описание

Heads with the contact height measurement unit
Model IM-6225T
Type Head
Image sensor 1' 6.6 mega pixel monochrome CMOS
Display 10. 4' LCD monitor (XGA: 1024 ? 768) External monitor connectable (clone output)
Receiver lens Double telecentric lens
Image measurement Field of view Wide field: o100 ? L200 mm, High precision: 25 ? L125 mm
Minimum display unit 0.1 µm
Repeatability W/o stage movement Wide field: ±1 µm, High precision: ±0. 5 µm
With stage movement Wide field: ±2 µm, High precision: ±1. 5 µm
Measurement accuracy (±2?) W/o binding Wide field: ±5 µm*1, High precision: ±2 µm*2
With binding Wide field: ±(7 + 0. 02 L) µm*3, High precision: ±(4 + 0. 02 L) µm*4
Height measurement Measuring range 0 to 60 mm
Measurement force 0.3 N
Measurement position accuracy (XY) ±0.7 mm
Minimum display unit 1 µm
Measurable area (XY) Standard probe Wide field: 45 ? 95 mm, High precision: 7.5 ? 25 mm
Wide-range probe Wide field: 95 ? 95 mm, High precision: 60 ? 25 mm
Repetition accuracy Standard probe ±2 µm*5
Wide-range probe ±5 µm*5
Measurement accuracy Standard probe ±7.5 µm*6
Wide-range probe ±15 µm*6
External remote input Non-voltage input (with and without contact)
External output OK/NG/FAIL/MEAS. Relay output/rated load: 24 VDC, 0. 5 A/ON resistance
Interface LAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 series A 6 ports (front: 2, rear: 4)
Record Hard disk drive 250 GB
Illumination system Transparent Telecentric transparent illumination
Ring Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
X stage Moving range 100 mm (electric)
Z stage 30 mm (electric)
Withstand load 2 kg
Power supply Power voltage 100 to 240 VAC 50/60 Hz
Power consumption 310 VA max.
Environmental resistance Ambient temperature +10 to +35 °C
Relative humidity 20 to 80 % RH (No condensation)
Weight Approx. 34 kg
*1 In the range of o80 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position *2 In the range of o20 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position *3 In the range of o80 ? 180 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of o20 ? 120 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units) *5 When the maximum measurement height is set to 30 mm or less, ±3 µm for the standard probe and ±6 µm for the wide-range probe when the maximum measurement height is greater than 30 mm and less than or equal to 60 mm *6 When the maximum measurement height is set to 30 mm or less, ±12 µm for the standard probe and ±21 µm for the wide-range probe when the maximum measurement height is greater than 30 mm and less than or equal to 60 mm
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